The issue exists for a long time and still exists on jdk-16-valhalla+1-102.

How to reproduce:
- build benchmarks.jar from open jdk.
- java --enable-preview -jar target/benchmarks.jar org.openjdk.bench.valhalla.array.fill.Inline64byte.Val_to_Val_as_Val_fillinst -p size=100

# A fatal error has been detected by the Java Runtime Environment:
#
# SIGSEGV (0xb) at pc=0x00007ff306bc7697, pid=12860, tid=12884
#
# JRE version: Java(TM) SE Runtime Environment (16.0+1) (build 16-valhalla+1-102)
# Java VM: Java HotSpot(TM) 64-Bit Server VM (16-valhalla+1-102, mixed mode, sharing, tiered, compressed oops, g1 gc, linux-amd64)
# Problematic frame:
# V [libjvm.so+0x6ba697][thread 12885 also had an error]
  G1ParScanThreadState::copy_to_survivor_space(G1HeapRegionAttr, oopDesc*, markWord)+0x627
#
# Core dump will be written. Default location: Core dumps may be processed with "/usr/share/apport/apport %p %s %c %d %P %E" (or dumping to /home/skuksenk/wrk/valhalla-weekly/core.12860)
#
# An error report file with more information is saved as:
# /home/skuksenk/wrk/valhalla-weekly/hs_err_pid12860.log
[thread 12886 also had an error]
[thread 12862 also had an error]
Compiled method (c1) 491 524 3 org.openjdk.bench.valhalla.array.fill.Inline64byte::Val_to_Val_as_Val_fillinst (30 bytes)
 total in heap [0x00007ff2e9196190,0x00007ff2e9196810] = 1664
 relocation [0x00007ff2e9196300,0x00007ff2e9196348] = 72
 main code [0x00007ff2e9196360,0x00007ff2e91966c0] = 864
 stub code [0x00007ff2e91966c0,0x00007ff2e91966f0] = 48
 oops [0x00007ff2e91966f0,0x00007ff2e91966f8] = 8
 metadata [0x00007ff2e91966f8,0x00007ff2e9196700] = 8
 scopes data [0x00007ff2e9196700,0x00007ff2e9196758] = 88
 scopes pcs [0x00007ff2e9196758,0x00007ff2e91967e8] = 144
 dependencies [0x00007ff2e91967e8,0x00007ff2e91967f0] = 8
 nul chk table [0x00007ff2e91967f0,0x00007ff2e9196810] = 32
Compiled method (c1) 491 524 3 org.openjdk.bench.valhalla.array.fill.Inline64byte::Val_to_Val_as_Val_fillinst (30 bytes)
 total in heap [0x00007ff2e9196190,0x00007ff2e9196810] = 1664
 relocation [0x00007ff2e9196300,0x00007ff2e9196348] = 72
 main code [0x00007ff2e9196360,0x00007ff2e91966c0] = 864
 stub code [0x00007ff2e91966c0,0x00007ff2e91966f0] = 48
 oops [0x00007ff2e91966f0,0x00007ff2e91966f8] = 8
 metadata [0x00007ff2e91966f8,0x00007ff2e9196700] = 8
 scopes data [0x00007ff2e9196700,0x00007ff2e9196758] = 88
 scopes pcs [0x00007ff2e9196758,0x00007ff2e91967e8] = 144
 dependencies [0x00007ff2e91967e8,0x00007ff2e91967f0] = 8
 nul chk table [0x00007ff2e91967f0,0x00007ff2e9196810] = 32
#
# If you would like to submit a bug report, please visit:
# https://bugreport.java.com/bugreport/crash.jsp
#
<forked VM failed with exit code 134>
<stdout last='20 lines'>
 metadata [0x00007ff2e91966f8,0x00007ff2e9196700] = 8
 scopes data [0x00007ff2e9196700,0x00007ff2e9196758] = 88
 scopes pcs [0x00007ff2e9196758,0x00007ff2e91967e8] = 144
 dependencies [0x00007ff2e91967e8,0x00007ff2e91967f0] = 8
 nul chk table [0x00007ff2e91967f0,0x00007ff2e9196810] = 32
Compiled method (c1) 491 524 3 org.openjdk.bench.valhalla.array.fill.Inline64byte::Val_to_Val_as_Val_fillinst (30 bytes)
 total in heap [0x00007ff2e9196190,0x00007ff2e9196810] = 1664
 relocation [0x00007ff2e9196300,0x00007ff2e9196348] = 72
 main code [0x00007ff2e9196360,0x00007ff2e91966c0] = 864
 stub code [0x00007ff2e91966c0,0x00007ff2e91966f0] = 48
 oops [0x00007ff2e91966f0,0x00007ff2e91966f8] = 8
 metadata [0x00007ff2e91966f8,0x00007ff2e9196700] = 8
 scopes data [0x00007ff2e9196700,0x00007ff2e9196758] = 88
 scopes pcs [0x00007ff2e9196758,0x00007ff2e91967e8] = 144
 dependencies [0x00007ff2e91967e8,0x00007ff2e91967f0] = 8
 nul chk table [0x00007ff2e91967f0,0x00007ff2e9196810] = 32
#
# If you would like to submit a bug report, please visit:
# https://bugreport.java.com/bugreport/crash.jsp
#
</stdout>
<stderr last='20 lines'>
</stderr>

Note:
The error doesn't happen with -Xint or -XX:-TieredCompilation.